Mark Goorsky, Ph.D.
Mark Goorsky, Ph.D.
Professor, Department of Materials Science and Engineering
University of California, Los Angeles
Speech Title: 
Electrical Conductivity Across Wafer Bonded III-V Interfaces
Abstract: 
III-V bonding, while showing great promise in the development of world-record solar cell performance, has not been used widely in other applications. A better understanding of the fundamental nature of bonded interfaces leads to insight about the bonding process and a more thorough investigation for other device applications. We addressed the electrical conductivity across various III-V wafer bonded pairs based on understanding the nature of the grain boundary that exists at the interface. The combinations included different materials, different miscut (tilt), and in-plane (twist) misorientation. With results from bonding of several different materials combinations, surface orientations, and passivation treatments, as well as an assessment of barrier heights reported in the literature for transport in polycrystalline III-V materials and other III-V bonded materials combinations, a general model has emerged which suggests that direct wafer bonding of III-V and other materials has a wide variety of applications. The electrical characteristics of a grain boundary, whether in polycrystalline material or at a bonded interface, are determined by the presence of defect states and interfacial charge which create band bending and Fermi level pinning. The barrier heights and widths from zero bias conductance vs bias measurements over a wide range of temperatures and for different materials were compared to the band structure simulations of bonded semiconductor heterojunctions with resultant I-V curves showing good agreement between experiment and theory. The role of sulfur to passivate the interface corresponded to a drop in the interface state density by a factor of three. Based on this study which combines experimental results and transport modelling, it is expected certain material combinations and orientations exhibit higher electrical conductivity across the interface, but more importantly, modelling supports the finding that high doping at mismatched interfaces helps to significantly reduce the interface barrier height.
Bio: 

Dr. Mark Goorsky is a Professor of Materials Science and Engineering at UCLA. He was chair of the department from 2004-2009. He received his Ph.D. in Materials Science and Engineering in 1989 from the Massachusetts Institute of Technology, and his B.S. in Materials Science and Engineering in 1984 from Northwestern University. Dr. Goorsky held a post-doctoral position at the IBM Thomas J. Watson Research Center (Jan. 1989 - June 1991) and started at UCLA in 1991.
Dr. Goorsky is an associate editor of the Journal of Crystal Growth. He served as a member of the United States Air Force Scientific Advisory Board (2010-2015), which assesses the state of research and development in technologies that are crucial to the Air Force and provides forecasts of long-range science and technology. In 2016, he received the 2016 UCLA Distinguished Teaching Award. The award, first handed out in 1961, recognizes extraordinary teachers who have made a significant impact on their students through classroom teaching and curriculum development. He was also awarded the T.S. Walton Award from the Science Foundation of Ireland in 2010, received the TRW Outstanding Young Teacher Award in the School of Engineering and Applied Science in 1993, the National Science Foundation CAREER Award in 1995, and the Northrop Grumman Outstanding Young Researcher Award in 1996.
His research focuses on materials integration and the relationship between materials defects and device performance in semiconductor structures. He has published over 240 papers and given 180 presentations on his research work and has received three U.S. patents.

The Henry Samueli School of Engineering

The School of Physical Sciences

Tel Aviv University